Abstract: In general, atomic emission spectrometry (AES) is an excellent technique for determination of metal elements. However, its capability of determining nonmetals has not been developed well. The major reasons are the resonance lines of most nonmetals lie in the vacuum ultraviolet spectral region and the ionic lines of these elements are difficult to be used because the ionization potentials of the elements are very high. And furthermore only He plasma can efficiently excit those ionic resonance lines. The practical application of HeICP-AESto determining the nonmetals is also difficult because its operating and perchace costs are very high. In contrast to HeICPAES, the costs of He microwave induced plasma (MIP)-AESare relatively low, HeMIPhas a high excitation capability which can excite ionic lines of various nonmetals and the nonmetals can be determined by HeMIP-AESwith a high sensitivity.

Key words: Microwave induced plasma, Atomic emission spectrometry, Nonmetals