Abstract: The thermal induced topography change in a model system consisting of a polymer film on a Si substrate capped by a thin metal layer has been studied by using AFM.Regular lateral patterns over large areas were observed on the surface when the system was heated to a sufficiently high temperature.2D-FFT analysis to the AFM images indicates that the patterns are isotropic and have well defined periodicities.The periodicities of the characteristic patterns are found to depend strongly on the annealing temperature.The study of the kinetics of the formation reveals that such a topography forms almost instantaneously once the critical temperature is reached.It is suggested that this wave-like surface morphology is driven by the thermal expansion coefficient mismatch of the different layers.This method for generating regular wave-like patterns could be used as a general method for patterning various organic materials into micro/nanostructures.

Key words: Thermal induce, Topography change, Polymer thin film, AFM