Mass Transport of β-Diketonate Precursors for MOCVD of YBa2Cu3O7-δHigh TcSuperconducting Thin Films

Abstract

Abstract: Mass transport of Y(dpm)₂Ba(dpm)₅·OH·2Ho and Cu(dpm)₂by a carrier gas(argon) was theoretically considered and experimentally studied as a function of the system with operating parameters including temperature, carrier gas flow rate and system pressure. The experimental results are in a good agreement with the theoretical prediction. The mechanism of mass transport of these organometallic precursors and their use for YBCO film stoichiometry control and reproducibility are discussed.

Key words: MOCVD, High T_cthin films, β-Diketonate precursor, Vaporization rate, Mass transport

MENG Guang-yao, YUAN Zhi-hao, YANG Ping-hua, PENG Ding-kun . Mass Transport of β-Diketonate Precursors for MOCVD of YBa₂Cu₃O_7-δHigh T_cSuperconducting Thin Films[J]. Chemical Research in Chinese Universities, 1996, 12(1): 92-101.

[1]	LIU Ming-fei, HU Yong-xing, JIANG Yin-zhu, GAO Jian-feng, WANG Yan-yan , MENG Guang-yao. Synthesis and Characterization of Pr(DPM)₃ Served as Precursor for MOCVD [J]. Chemical Research in Chinese Universities, 2007, 23(3): 258-262.
[2]	HOU Chang-min , HUANG Ke-ke , GAO Zhong-min , LI Xiang-shan , FENG Shou-hua , ZHANG Yuan-tao , ZHU Hui-chao , DU Guo-tong . Studies on Crystal Orientation of ZnO Film on Sapphire Using High-throughout X-ray Diffraction [J]. Chemical Research in Chinese Universities, 2007, 23(1): 1-4.
[3]	HUANG Ke-ke , HOU Chang-min , GAO Zhong-min , LI Xiang-shan , FENG Shou-hua , ZHANG Yuan-tao , ZHU Hui-chao , DU Guo-tong . Photoluminescence Properties of Two-dimensional Planar Layer and Three-dimensional Island Layer for ZnO Films Grown Using MOCVD [J]. Chemical Research in Chinese Universities, 2006, 22(6): 692-695.
[4]	HUANG Ke-ke, HOU Chang-min, GAO Zhong-min, LI Xiang-shan, FENG Shou-hua, ZHANG Yuan-tao, ZHU Hui-chao, DU Guo-tong. Photoluminescence Properties of Two-dimensional Planar Layer and Three-dimensional Island Layer for ZnO Films Grown Using MOCVD [J]. Chemical Research in Chinese Universities, 2006, 22(6): 692-695.
[5]	HOU Chang-min, HUANG Ke-ke, GAO Zhong-min, LI Xiang-shan, FENG Shou-hua, ZHANG Yuan-tao, DU Guo-tong. Structural and Optical Properties of ZnO Films with Different Thicknesses Grown on Sapphire by MOCVD [J]. Chemical Research in Chinese Universities, 2006, 22(5): 552-555.
[6]	HOU Chang-min , HUANG Ke-ke , GAO Zhong-min , LI Xiang-shan , FENG Shou-hua , ZHANG Yuan-tao , DU Guo-tong . Structural and Optical Properties of ZnO Films with Different Thicknesses Grown on Sapphire by MOCVD [J]. Chemical Research in Chinese Universities, 2006, 22(5): 552-555.
[7]	DONG Xin, LIU Da-li, DU Guo-tong, ZHANG Yuan-tao, ZHU Hui-chao, YAN Xiao-long, GAO Zhong-min. Effects of ZnO Buffer Layer Thickness on Properties of Mg_xZn_1-xO Thin Films Deposited by MOCVD [J]. Chemical Research in Chinese Universities, 2005, 21(5): 583-586.
[8]	YANG Hong-jun, ZHAO Bai-jun, FANG Xiu-jun, DU Guo-tong, LIU Da-li, GAO Chun-xiao, LIU Xi-zhe. High Resistive ZnO/Diamond/Si Films Grown via Metal-organic Chemical Vapour Deposition [J]. Chemical Research in Chinese Universities, 2005, 21(2): 137-140.
[9]	ZHAO Bai-jun, DU Guo-tong, YANG Hong-jun, WANG Jinz-hong, ZHANG Yuan-tao, YANG Xiao-tian, LIU Bo-yang, MA Yan, YANG Tian-peng, LIU Da-li, LI Wan-cheng, FANG Xiu-jun. Influence of Annealing on Properties of ZnO Films Grown via Plasma-enhanced MOCVD [J]. Chemical Research in Chinese Universities, 2003, 19(4): 383-385.
[10]	WANG Ben-zhong, ZHAO Fang-hai, PENG Yu-heng, JIN Zhi, LI Yu-dong, YANG Shu-ren, LIU Shi-yong . Formation of Self-organization InAs Quantum Dots on (001) InP Substrate by As/P Exchange Reaction in MOCVD [J]. Chemical Research in Chinese Universities, 1998, 14(2): 221-224.
[11]	REN Peng-cheng, TAN Zhong-ke, LUO Wen-xiu. Studies of Laser-induced-MOCVDZinc Oxide Films [J]. Chemical Research in Chinese Universities, 1994, 10(3): 240-243.
[12]	LUO Wen-xiu, REN Peng-cheng, TAN Zhong-ke, LI Zhi-ping. Preparation of the In₂O₃·Sn Films by MO-CVD Technique [J]. Chemical Research in Chinese Universities, 1992, 8(4): 477-479.
[13]	Luo Wenxiu, Tan Zhongke . Studies on the Thin Film of TiO₂, Fe₂O₃ and SnO₂ by the Organometallic-CVD Technique [J]. Chemical Research in Chinese Universities, 1989, 5(3): 276-278.

Mass Transport of β-Diketonate Precursors for MOCVD of YBa₂Cu₃O_7-δHigh T_cSuperconducting Thin Films

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 13

Recommended Articles

Metrics

Comments