Chemical Research in Chinese Universities ›› 1994, Vol. 10 ›› Issue (3): 240-243.

• Articles • Previous Articles     Next Articles

Studies of Laser-induced-MOCVDZinc Oxide Films

REN Peng-cheng, TAN Zhong-ke, LUO Wen-xiu   

  1. Ceiiter for Functional Materials Research, Qingdao Institute of Chemical Technology, Qingdao, 266042
  • Received:1993-10-13 Online:1994-08-24 Published:2011-08-17
  • Supported by:

    SupNurted by the National Natural Science Foundation of China.

Abstract: Thin films of ZnO were prepared using the double photobeams ultraviolet laserinduced-metallorganic chemical vapour deposition (MOCVD)technique.The struc-ture and transparent photoconductive properties of these films were investigated us-ing X-ray diffraction (XRD), reflecting electron diffraction (RED) .scanning elec-tron microscopy (SEM) and ultraviolet visible absorption spectrometry (UV) .Theexperiments showed that the technique produced superior quality films of polycrys-tal ZnO1-x (the O-vacancies in the ZnO lattice), and possessed higher depositionrate, lower growth temperature conipared with CVDor MOCVD technique and thethin films had far better transparent photoconductive properties than tliose grownby the conventional CVDor MOCVD technique.

Key words: Double-photobeams ultraviolet laser induction, Metallorganic chemicalvapour tleposition(MOCVD), Zinc oxide film