Chemical Research in Chinese Universities ›› 2020, Vol. 36 ›› Issue (4): 694-698.doi: 10.1007/s40242-020-0197-9

• Articles • Previous Articles     Next Articles

All-Ti3C2TxMXene Based Flexible On-chip Microsupercapacitor Array

LI La1, CHEN Di2, SHEN Guozhen1   

  1. 1. State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences & Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100083, P. R. China;
    2. School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, P. R. China
  • Received:2020-06-19 Revised:2020-07-08 Online:2020-08-01 Published:2020-07-09
  • Contact: CHEN Di, SHEN Guozhen E-mail:gzshen@semi.ac.cn;chendi@ustb.edu.cn
  • Supported by:
    Supported by the National Natural Science Foundation of China(Nos.51672308, 51972025, 61888102).

Abstract: Flexible on-chip microsupercapacitors(MSCs) are highly desired for integrated wearable or portable electronics due to their advantages of small size, high power density, easy integration, long lifespan, high security, and flexibility. The output voltage of MSCs can be improved by designing MSC arrays, which could further expand their application fields. In this work, we proposed a facile laser direct cutting method to prepare an on-chip flexible MSC array using Ti3C2TxMXene as both current collector and electrode materials. The designed MSC in PVA/H2SO4 all-solid-state gel electrolyte exhibits a large volume/areal capacitance of 770.72 F/cm3(46.24 mF/cm2) at a scan rate of 20 mV/s, a high energy density of 68.51 mW·h/cm3 at a power density of 6.16 W/cm3, excellent cycling stability with capacitance retention of 98.50% after 10000 charge/discharge cycles. The MSC also shows superior flexibility and stability even after repetition of charge/discharge cycles under the convex and concave bending states. In addition, the assembled MSC array(4 in series) provides a high voltage of 3.2 V, which could easily power a purple light-emitting diode more than 10 min, demonstrating its potential application in integrated portable/wearable devices.

Key words: Ti3C2Tx, MXene, Microsupercapacitor, Laser cutting, Flexible energy storage