Growth of Single-walled Carbon Nanotubes on Substrates Using Carbon Monoxide as Carbon Source

doi:10.1007/s40242-021-1277-1

Chemical Research in Chinese Universities ›› 2021, Vol. 37 ›› Issue (5): 1125-1129.doi: 10.1007/s40242-021-1277-1

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Growth of Single-walled Carbon Nanotubes on Substrates Using Carbon Monoxide as Carbon Source

ZHAO Xue¹, ZHANG Xinrui¹, LIU Qidong¹, ZHANG Zeyao^1,2,3,4, LI Yan^1,2

1. Beijing National Laboratory for Molecular Science, Key Laboratory for the Physics and Chemistry of Nanodevices, State Key Laboratory of Rare Earth Materials Chemistry and Applications, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P. R. China;
2. Peking University Shenzhen Institute, Shenzhen 518057, P. R. China;
3. College of Engineering, Peking University, Beijing 100871, P. R. China;
4. PKU-HKUST ShenZhen-HongKong Institution, Shenzhen 518057, P. R. China

Received:2021-07-19 Revised:2021-08-16 Online:2021-10-01 Published:2021-08-23
Contact: LI Yan E-mail:yanli@pku.edu.cn
Supported by:
This work was supported by the Project of the Ministry of Science and Technology of China(No.2016YFA0201904), the National Natural Science Foundation of China(No.21631002), the Project of the Beijing National Laboratory for Molecular Sciences, China(No.BNLMSCXTD-202001), the Shenzhen Basic Research Project, China(No.JCYJ20170817113121505) and the Shenzhen KQTD Project, China (No.KQTD20180411143400981).

Abstract

Abstract: The growth of single-walled carbon nanotubes(SWCNTs) on substrates has attracted great interests because of the potential applications in various fields. Carbon monoxide(CO) was used as the carbon source for the growth of SWCNTs on silicon substrates. Random or oriented SWCNTs can be produced by varying the CO flow rate. When the flow rate of CO was as low as 20 sccm(sccm:standard cubic centimeter per minute), dense SWCNT networks with clean surface were produced. When the flow rate was above 50 sccm, vertically aligned SWCNT(VA-SWCNT) arrays were grown. Well-aligned VA-SWCNT arrays were obtained in the temperature range of 650-800℃ and the content of large-diameter(above 1.7 nm) tubes in the array increased with the temperature. The height of the array was affected by the growth temperature, the CO flow rate, and the growth time. These findings indicate CO can be used as an efficient carbon source for the growth of SWCNTs on substrates under low flow rates.

Key words: Carbon monoxide, Vertically aligned single-walled carbon nanotube, Chemical vapor deposition, Flow rate

ZHAO Xue, ZHANG Xinrui, LIU Qidong, ZHANG Zeyao, LI Yan. Growth of Single-walled Carbon Nanotubes on Substrates Using Carbon Monoxide as Carbon Source[J]. Chemical Research in Chinese Universities, 2021, 37(5): 1125-1129.

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Growth of Single-walled Carbon Nanotubes on Substrates Using Carbon Monoxide as Carbon Source

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