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Novel One-component Positive-tone Chemically Amplified I-Line Molecular Glass Photoresist Based on Tannic Acid
WEI Qi, WANG Liyuan
Novel One-component Positive-tone Chemically Amplified I-Line Molecular Glass Photoresist Based on Tannic Acid
WEI Qi, WANG Liyuan
高等学校化学研究 . 2015, (
4
): 585 -589 . DOI: 10.1007/s40242-015-5016-3